Three-Dimensional Microcavity Array Electrodes for High-Capacitance All-Solid-State Flexible Microsupercapacitors
By Maeng, Jimin; Kim, Young-Joon; Meng, Chuizhou; Irazoqui, Pedro P.
Published in ACS Applied Materials & Interfaces
2016
Abstract
We report novel three-dimensional (3D) microcavity array electrodes for high-capacitance all-solid-state microsupercapactiors. The microcavity arrays are formed in a polymer substrate via a plasma-assisted reactive ion etching (RIE) process and provide extra sidewall surface areas on which the active materials are grown in the form of nanofibers. This 3D structure leads to an increase in the areal capacitance by a factor of 2.56 for a 15-?m-deep cavity etching, agreeing well with the prediction. The fabricated microsupercapactiors exhibit a maximum areal capacitance of 65.1 mF cm